• Spatial Light Modulators
• Infrared Scene Projectors

	Technical Brief (2008) (IR scene projector) White Paper (2001) (Phase-only modulator)

Optron is currently developing hybrid VLSI-MEMS membrane mirror light modulators (VLSI-MMLM) for high-performance infrared scene projection, large-format projection displays, and adaptive optics / wavefront correction applications.

VLSI-MMLM devices consist of a membrane mirror fabricated in our hybrid polymer MEMS process over an integrated high-voltage VLSI driver array, which supports high framerate flicker-free operation. Our flexible fabrication process allows the creation of a wide range of pixel sizes and pitches using a common driver platform.

Our membrane mirror technology is based upon a diffractive phase grating. Using electrostatic actuation, the membrane mirror surface is deformed in a controlled manner, creating a programmable pattern of diffraction loci. The mirror surface is fully metallized to a 100% fill factor, enabling our devices to tolerate high optical power.

Current VLSI-MMLM devices in development:

• Infrared (MWIR/LWIR) Scene Projector
  • 200 x 200 array of 100-µm pixels
• High-Resolution Visible Scene Projector
  • 1000 x 1000 array of 20-µm pixels
• Phase-only modulator
  • 500 x 500 array of 40-µm pixels

If you are interested in the SLM technology under development, please contact us at techsales@optronsystems.com.

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