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DEVICE
OPERATION AND APPLICATIONS
As shown below, the diffractive optical shutter consists
of a thin, metal-coated membrane mirror, suspended over a 2-D array
of wells. The membrane mirror is electrostatically deformed, thus
creating a diffractive grating. The MMLS is driven by a high-voltage,
high-bandwidth amplifier & controller that can be fed by a signal/pulse
generator. One version of the amplifier can also provide a DC offset
that is necessary for certain operating modes of the MMLS. The spatial
filter is either a circular aperture or a circular opaque disc positioned
at the center of the focal plane of the Fourier lens.

Figure 1: Architecture of the membrane-mirror light
shutter system with zero-order pass spatial filtering
ZERO-ORDER PASS OPERATION
In zero-order-pass operation, the Fourier-plane
spatial filter is a circular aperture. The light to be modulated
or chopped (incoherent or coherent, polarized or unpolarized) is
nominally collimated before it reaches the MMLS (see Fig. 1). Typically
up to 100 full cone angle of divergence can be tolerated. When there
is no voltage across the wells, the membrane mirror is flat and
the light reflecting off the shutter surface maintains its collimation.
Thus, the Fourier transform lens focuses this light to a single
zero-order spot which passes through the spatial filtering aperture
and is recollimated by the second lens as shown. This corresponds
to the on state of the shutter. In this case, essentially all the
light reaching the modulator is recovered as on-state radiance.
If a small-diameter laser beam is used (e.g., 2-5 mm) no lenses
are necessary. Generally, in this case, the zero order light is
well separated from the higher orders and is easily filtered out.
When a voltage waveform is applied to the electrodes,
the resulting electrostatic forces deform the membrane mirror into
the underlying wells, and the membrane mirror becomes a 2-D diffraction
grating. As the voltage across the wells increases, the deformation
of the membrane-mirror increases, and more and more light is scattered
out of the zero order into higher orders leading to lower and lower
zero-order output intensity. Thus, gray-scale intensity modulation
of the zero-order light is achieved. At some specific applied voltage,
Vxt , the zero-order light is extinguished and the off state is
achieved. The modulator may be driven with square waves or pulses
for binary on/off operation, or with sine waves, triangular waves,
or any arbitrary waveform.
APPLICATIONS
- Laser-pulse grating
- Phase modulation
- High-speed laser printing
- Broad-band image chopping
- Adaptive optics
- Two-port beam switching
- High-speed photography
- Beam spoiling
- Variable beam splitting
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